During the process of annealing, the F color centers were thoroughly eliminated and the escaped free electrons could be captured by V ions with higher valance states than+ 3 to further improve the concentration of tetrahedral V 3+ ions. 同时,F心在退火过程中被完全消除,释放出来的自由电子被高价态的V离子俘获,可以进一步提高晶体中四面体格位V3+离子的浓度。
Then, we analyzed the reason of the changes of hardness and resistivity of the films after the annealing process, discussed the effects of the annealing process and the experimental condition on the color of the films. 对退火后薄膜内微观结构的变化进行初步分析,由此讨论了退火后薄膜硬度及电阻率变化的原因,并解释了制备条件变化及退火处理对所制薄膜色泽影响及机理。